E.A. Lavrov, A.V. Kozhemanov FSUE «VNIIFTRI», Mendeleevo, Moscow region, Russialavrov@vniiftri.ru,kaw@vniiftri.ru Al’manac of Modern Metrology № 4 (28) 2021, pages 194–199 Annotation. Piezo actuator has been developed and incorporated into a two-wave laser interferometer that simulates the movement of the reference arm mirror to accumulate measurement results and ensure a resolution of less than one interference … Continue reading Drive unit of short haul reflector of a two-wave interferometer for registration of fractional parts of interference bands
